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X-ray Reflectivity Characterization of ZnO/Al 2 O 3 Multilayers Prepared by Atomic Layer Deposition

✍ Scribed by Jensen, J. M.; Oelkers, A. B.; Toivola, R.; Johnson, D. C.; Elam, J. W.; George, S. M.


Book ID
121330293
Publisher
American Chemical Society
Year
2002
Tongue
English
Weight
110 KB
Volume
14
Category
Article
ISSN
0897-4756

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