✦ LIBER ✦

Synchrotron X-ray reflectivity study of high dielectric constant alumina thin films prepared by atomic layer deposition

✍ Scribed by Yongtaek Hwang; Kyuyoung Heo; Chang Hwan Chang; Man Kil Joo; Moonhor Ree

Book ID: 108289275
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 434 KB
Volume: 510
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.12.162

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High temperature x-ray diffraction studi

High temperature x-ray diffraction studies of zirconia thin films prepared by reactive pulsed laser deposition

✍ G. Balakrishnan; P. Kuppusami; S. Murugesan; E. Mohandas; D. Sastikumar 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 291 KB

X-ray absorption spectroscopy study of Y

X-ray absorption spectroscopy study of Yb2O3 and Lu2O3 thin films deposited on Si(1 0 0) by atomic layer deposition

✍ M. Malvestuto; G. Scarel; C. Wiemer; M. Fanciulli; F. D’Acapito; F. Boscherini 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 345 KB

X-ray spectral analysis of the interface

X-ray spectral analysis of the interface of a thin Al2O3film prepared on silicon by atomic layer deposition

✍ A. S. Shulakov; A. P. Braiko; S. V. Bukin; V. E. Drozd 📂 Article 📅 2004 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 76 KB

Interface composition of atomic layer de

Interface composition of atomic layer deposited HfO2 and Al2O3 thin films on InAs studied by X-ray photoemission spectroscopy

✍ R. Timm; M. Hjort; A. Fian; C. Thelander; E. Lind; J.N. Andersen; L.-E. Wernerss 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 414 KB

We present a synchrotron-based XPS investigation on the interface between InAs and Al 2 O 3 or HfO 2 layers, deposited by ALD at different temperatures, for InAs substrates with different surface orientations as well as for InAs nanowires. We reveal the composition of the native Oxide and how the hi

X-ray, reflection high electron energy d

X-ray, reflection high electron energy diffraction and X-ray photoelectron spectroscopy studies of InSe and γ-In2Se3 thin films grown by molecular beam deposition

✍ L. Brahim-Otsmane; J.-Y. Emery; M. Eddrief 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 525 KB