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X-ray absorption spectroscopy study of Yb2O3 and Lu2O3 thin films deposited on Si(1 0 0) by atomic layer deposition

✍ Scribed by M. Malvestuto; G. Scarel; C. Wiemer; M. Fanciulli; F. D’Acapito; F. Boscherini

No coin nor oath required. For personal study only.

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X-ray absorption spectroscopy study of Yb2O3 and Lu2O3 thin films deposited on Si(1&#xa0;0&#xa0;0) by atomic layer deposition