𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication

✍ Scribed by Ben Pecholt; Monica Vendan; Yuanyuan Dong; Pal Molian

Publisher
Springer
Year
2007
Tongue
English
Weight
691 KB
Volume
39
Category
Article
ISSN
0268-3768

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Fabrication of pulsed-laser deposited V2
Fabrication of pulsed-laser deposited V2O5 thin films for electrochromic devices
✍ Yusuke Iida; Yoshikazu Kaneko; Yoshinori. Kanno πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 499 KB

V 2 O 5 thin films were prepared by using pulsed-laser deposition technique. The influences of substrate temperature and oxygen partial pressure on the growth of V 2 O 5 films were studied. X-ray diffraction, atomic force microscopy, Raman measurements and the optical transmission measurements have