✦ LIBER ✦
Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation
✍ Scribed by Wen-Teng Chang; Christian Zorman
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 425 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0946-7076
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