✦ LIBER ✦

Ultra-short pulsed laser deposition and patterning of SiC thin films for MEMS fabrication

✍ Scribed by Monica Vendan; Pal Molian; Ashraf Bastawros; James Anderegg

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 681 KB
Volume: 8
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2006.02.002

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

ChemInform Abstract: Pulsed-Laser Deposi

ChemInform Abstract: Pulsed-Laser Deposition of YVO4:Eu Phosphor Thin-Films for Low Temperature Fabrication.

✍ Weekyung Kang; Jaesung Park; Dong-Kuk Kim; Kyung-Soo Suh 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 31 KB 👁 2 views

Fabrication of pulsed-laser deposited V2

Fabrication of pulsed-laser deposited V2O5 thin films for electrochromic devices

✍ Yusuke Iida; Yoshikazu Kaneko; Yoshinori. Kanno 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 499 KB

V 2 O 5 thin films were prepared by using pulsed-laser deposition technique. The influences of substrate temperature and oxygen partial pressure on the growth of V 2 O 5 films were studied. X-ray diffraction, atomic force microscopy, Raman measurements and the optical transmission measurements have

Optical and electrical properties of In-

Optical and electrical properties of In-doped CdO thin films fabricated by pulse laser deposition

✍ B.J. Zheng; J.S. Lian; L. Zhao; Q. Jiang 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 537 KB

Conformity of Aluminum Thin Films Deposi

Conformity of Aluminum Thin Films Deposited onto Micro-Patterned Silicon Wafers by Pulsed Laser Deposition, Magnetron Sputtering, and CVD

✍ Anne-Lise Thomann; Constantin Vahlas; Lyacine Aloui; Diane Samelor; Amael Cailla 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 667 KB

Effects of substrate parameters on struc

Effects of substrate parameters on structure and optical properties of ZnO thin films fabricated by pulsed laser deposition

✍ X.Q. Wei; J.Z. Huang; M.Y. Zhang; Y. Du; B.Y. Man 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 741 KB

Structural and fluorescence properties o

Structural and fluorescence properties of thin films fabricated by pulsed laser deposition technique from Nd:KGW single crystal

✍ J. Lancok; C. Garapon; V. Vorlíček; M. Jelinek; M. Čerňanský 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 335 KB