✦ LIBER ✦
Conformity of Aluminum Thin Films Deposited onto Micro-Patterned Silicon Wafers by Pulsed Laser Deposition, Magnetron Sputtering, and CVD
✍ Scribed by Anne-Lise Thomann; Constantin Vahlas; Lyacine Aloui; Diane Samelor; Amael Caillard; Nurhul Shaharil; Romuald Blanc; Eric Millon
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 667 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0948-1907
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