Electrical, mechanical and metal contact properties of polycrystalline 3C-SiC films for MEMS in harsh environments

✍ Scribed by Jingchun Zhang; Carlo Carraro; Roger T. Howe; Roya Maboudian

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 536 KB
• Volume: 201
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2007.05.007