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Characterization of polycrystalline 3C–SiC thin film diodes for extreme environment applications

✍ Scribed by Gwiy-Sang Chung; Jeong-Hak Ahn

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
652 KB
Volume
85
Category
Article
ISSN
0167-9317

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✍ Kang-San Kim; Gwiy-Sang Chung 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 883 KB

This paper presents the growth conditions, physical, chemical, mechanical and optical characteristics of polycrystalline 3C-SiC films for extreme environment micro/nano-electromechanical systems (M/NEMS). The growth of the polycrystalline 3C-SiC thin film on oxidized Si wafers was carried out by usi