H2 carrier gas dependence of Young's modulus and hardness of chemical vapor deposited polycrystalline 3C-SiC thin films

✍ Scribed by Gwiy-Sang Chung; Ki-Bong Han

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 401 KB
• Volume: 39
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/j.mejo.2008.06.062