✦ LIBER ✦
Analysis of mechanical properties of N2 in situ doped polycrystalline 3C-SiC thin films by chemical vapor deposition using single-precursor hexamethyildisilane
✍ Scribed by Kang-San Kim; Ki-Bong Han; Gwiy-Sang Chung
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 282 KB
- Volume
- 405
- Category
- Article
- ISSN
- 0921-4526
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