✦ LIBER ✦

Ultra-shallow arsenic implant depth profiling using low-energy nitrogen beams

✍ Scribed by Sarah Fearn; Richard Chater; David McPhail

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Depth profiling of shallow arsenic impla

✍ J. B. Clegg 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 585 KB

Accurate depth profiling for ultra-shall

✍ Chie Hongo; Mitsuhiro Tomita; Miyuki Takenaka 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 125 KB

SIMS depth profiling of boron ultra shal

✍ M. Juhel; F. Laugier; D. Delille; C. Wyon; L.F.Tz. Kwakman; M. Hopstaken 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 246 KB

Experimental and simulated XPS depth pro

✍ JL Sullivan; Z Wronski; SO Saied; J Sielanko 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 275 KB

Dopant profiling of ultra shallow As imp

✍ S. Abo; S. Ichihara; T. Lohner; F. Wakaya; T. Eimori; Y. Inoue; M. Takai 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 150 KB

Low energy electron induced X-ray emissi

✍ H. Graoui; G. Conti; M. Hilkene; B. McComb; A. Tjandra; M.A. Foad; D. Kouzminov; 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 211 KB