Study of low energy high dose nitrogen i
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Sanghera, H. K.; Sullivan, J. L.
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Article
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1999
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John Wiley and Sons
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English
β 248 KB
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To advance the understanding of fundamental physical and chemical processes occurring in ion bombardment of metals, ion beam nitridation of aluminium, iron, copper and gold is studied in the energy range 2-5 keV, at current densities of 1 and 5 lA cm-2, for each ion energy. The concentration proΓles