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Accurate depth profiling for ultra-shallow implants using backside-SIMS

✍ Scribed by Chie Hongo; Mitsuhiro Tomita; Miyuki Takenaka

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 125 KB
Volume: 231-232
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2004.03.236

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