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Through-silicon-via insertion for performance optimization in three-dimensional integrated circuits

โœ Scribed by Libo Qian; Zhangming Zhu; Yintang Yang


Book ID
113798400
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
370 KB
Volume
43
Category
Article
ISSN
0026-2692

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Carbon-Nanotube Through-Silicon Via Inte
โœ Teng Wang; Kejll Jeppson; Lilei Ye; Johan Liu ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 520 KB

Interconnection of carbon-nanotube (CNT)-filled through-silicon vias is demonstrated through an easy-to-implement process based on mechanical fastening. Direct CNT-to-CNT and CNT-to-Au contacts are realized at the microscale, and their specific contact resistances extracted from electrical measureme