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The reduction of gate leakage of AlGaN/GaN metal–insulator–semiconductor high electron mobility transistors by N 2 plasma pretreatment

✍ Scribed by Feng, Qian; Hao, Yue; Yue, Yuan-Zheng


Book ID
120205168
Publisher
Institute of Physics
Year
2009
Tongue
English
Weight
520 KB
Volume
24
Category
Article
ISSN
0268-1242

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Fabrication of AlGaN/GaN double-insulato
✍ Balachander, Krishnan ;Arulkumaran, Subramaniam ;Sano, Y. ;Egawa, Takashi ;Baska 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 164 KB

## Abstract We report on the fabrication of AlGaN/GaN double‐insulator MOSHEMTs using SiO~2~ and SiN as the prime gate insulators. Both the dielectrics showed enhanced saturation current density and pinch‐off voltage compared to conventional HEMTs. The SiO~2~/SiN/AlGaN/GaN MOSHEMTs exhibited a low