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The investigation of key technologies for sub-0.1-μm CMOS device fabrication

✍ Scribed by Qiuxia Xu; He Qian; Huaxiang Yin; Lin Jia; Honghao Ji; Baoqing Chen; Yajiang Zhu; Min Liu; Zhensheng Han; Huanzhang Hu; Yulin Qiu; Dexin Wu

Book ID: 114538737
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 227 KB
Volume: 48
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.930660

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