✦ LIBER ✦
A novel double ion-implant (DII) Ti-salicide technology for high-performance sub-0.25-μm CMOS devices applications
✍ Scribed by Kong-Beng Thei; Wen-Chau Liu; Hung-Ming Chuang; Kun-Wei Lin; Chin-Chuan Cheng; Chin-Hsiung Ho; Chi-Wen Su; Shou-Gwo Wuu; Chung-Shu Wang
- Book ID
- 114538786
- Publisher
- IEEE
- Year
- 2001
- Tongue
- English
- Weight
- 97 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0018-9383
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