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The energy dependence of excessive vacancies created by high energy Si+ ion implantation in Si

✍ Scribed by Lin Shao; Michael Nastasi; Phillip E. Thompson; Irene Rusakova; Quark Y. Chen; Jiarui Liu; Wei-Kan Chu

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 183 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.193

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