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Electroluminescence analysis of the structural damage created in SiO2Si systems by Ar ion implantation

โœ Scribed by S Bota; B Garrido; J.R Morante; A Baraban; P.P Konorov


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
528 KB
Volume
39
Category
Article
ISSN
0038-1101

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