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Deep trapping of implanted Na+ and Li+ ions near the Si/SiO2 interface in metal-oxide-silicon structures

✍ Scribed by G. Greeuw; J.F. Verwey

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 663 KB
Volume: 28
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(85)90115-7

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