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Investigation of depth distributions of defects in Si created by high energy Ti ions

โœ Scribed by Ke-Ming Wang; Bo-Rong Shi; Shi-Jie Ma; Xiang-Dong Liu; Hong-Ying Zhai; Tian-Bing Xu; Pei-Ran Zhu; Qing-Tai Zhao


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
424 KB
Volume
45
Category
Article
ISSN
0042-207X

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