Investigation of adhesion enhancement of Cu films on Si under high energy ion irradiation by SAM/SIMS

✍ Scribed by Yang Dequan; Wang Guihua; Fan Chuizhen; Zhai Yajun

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 124 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91390-a