✦ LIBER ✦
Investigation using transmission electron microscopy of the microstructure of TiN film formed by ion beam enhanced deposition under 90 keV Xe+ bombardment on an Si substrate
✍ Scribed by Z.Y. Ching; Jing Zhu; X.H. Liu; Xi Wang; G.Q. Yang
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 260 KB
- Volume
- 66
- Category
- Article
- ISSN
- 0257-8972
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