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Laser pulse energy dependence of annealing in ion implanted Si and GaAs semiconductors

✍ Scribed by E. Rimini; P. Baeri; G. Foti

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 248 KB
Volume: 65
Category: Article
ISSN: 0375-9601
DOI: 10.1016/0375-9601(78)90602-3

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