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Lattice deformation and impurity location of Bi implanted Si induced by pulsed laser annealing

✍ Scribed by Cao De-xin; Chu Te-chang; Zhou Zu-yao; Dai Ren-zhi; Hu Jia-zen; B.I. Deutch


Publisher
Elsevier Science
Year
1981
Weight
276 KB
Volume
191
Category
Article
ISSN
0167-5087

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