DCXS and RHEED characterization of effectiveness of annealing implanted Si crystals by using pulsed UV excimer laser and sample scanning technique

✍ Scribed by Prof. J. Auleytner; Dr. B. Kozankiewicz; Dr. K. Regiński

• Publisher: John Wiley and Sons
• Year: 1994
• Tongue: English
• Weight: 267 KB
• Volume: 29
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.2170290122