Dynamic behavior of pulsed-laser annealing in ion-implanted silicon: Measurement of the time dependent optical reflectance

✍ Scribed by K. Murakami; M. Kawabe; K. Gamo; S. Namba; Y. Aoyagi

• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 805 KB
• Volume: 70
• Category: Article
• ISSN: 0375-9601
• DOI: 10.1016/0375-9601(79)90140-3