✦ LIBER ✦

Cavities at the Si projected range by high dose and energy Si ion implantation in Si

✍ Scribed by M. Canino; G. Regula; M. Lancin; M. Xu; B. Pichaud; E. Ntzoenzok; M.F. Barthe

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 737 KB
Volume: 159-160
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2008.10.034

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The energy dependence of excessive vacan

The energy dependence of excessive vacancies created by high energy Si+ ion implantation in Si

✍ Lin Shao; Michael Nastasi; Phillip E. Thompson; Irene Rusakova; Quark Y. Chen; J 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 183 KB

The mean projected range and range strag

The mean projected range and range straggling of Xe ions implanted in Si and Si1N1.375H0.603

✍ Ke-Ming Wang; Bo-Rong Shi; Hai-Yan Guo; Wei-Wang; Pei-Jun Ding 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 523 KB

The formation of buried layers by high-d

The formation of buried layers by high-dose ion-implantation in Si : A TEM study

✍ A. De Veirman; J. Van Landuyt 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 278 KB

The availability of high-current implanters, now makes it possible to perform high-dose ion-implantations. By modifying the implant species, dose, energy and substrate temperature and by choosing the suitable thermal annealing conditions buried layers below a monocrystalline Si overlayer can be for

The formation of buried Si3N4 layers in

The formation of buried Si3N4 layers in silicon by high dose nitrogen ion implantation

✍ U. Kreissig; W. Skorupa; E. Hensel 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 177 KB

Characterization of high-dose implants o

Characterization of high-dose implants of Co and Cr in Si by RBS

✍ A Climent-Font; U Wätjen; H Bax; L Palmetshofer 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 542 KB

Synthesis of oxides in Si0.5Ge0.5 alloy

Synthesis of oxides in Si0.5Ge0.5 alloy by high dose oxygen ion implantation

✍ J.E. Castle; H.D. Liu; J.F. Watts; P.L.F. Hemment; J.P. Zhang; S.M. Newstead; A. 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 368 KB