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Synthesis of oxides in Si0.5Ge0.5 alloy by high dose oxygen ion implantation

✍ Scribed by J.E. Castle; H.D. Liu; J.F. Watts; P.L.F. Hemment; J.P. Zhang; S.M. Newstead; A.R. Powell; T.E. Whall; E.H.C. Parker

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 368 KB
Volume: 12
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(92)90286-i

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