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Sublimation growth of an in-situ-deposited layer in SiC chemical vapor deposition on 4H-SiC(1 1 2¯ 0)

✍ Scribed by S.M. Bishop; C.L. Reynolds Jr.; Z. Liliental-Weber; Y. Uprety; C.W. Ebert; F.A. Stevie; J.-S. Park; R.F. Davis

No coin nor oath required. For personal study only.

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Sublimation growth of an in-situ-deposited layer in SiC chemical vapor deposition on 4H-SiC(1&#xa0;1&#xa0;2¯&#xa0;0)