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Growth of 3C–SiC(1 0 0) thin films on Si(1 0 0) by the molecular ion beam deposition

✍ Scribed by Takashi Matsumoto; Masato Kiuchi; Satoshi Sugimoto; Seiichi Goto


Book ID
117215979
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
685 KB
Volume
493
Category
Article
ISSN
0039-6028

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