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Preservation of polytypic structure in implanted 4H-SiC(1 1 0 0)

✍ Scribed by M Satoh; K Okamoto; Y Nakaike; K Kuriyama; M Kanaya; N Ohtani

Book ID: 114170829
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 201 KB
Volume: 148
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00888-x

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