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Structure of silicon carbide precipitates in oxygen‐implanted and annealed silicon‐on‐insulator material

✍ Scribed by Krause, S. J.; Jung, C. O.; Wilson, S. R.


Book ID
111967225
Publisher
American Institute of Physics
Year
1988
Tongue
English
Weight
673 KB
Volume
53
Category
Article
ISSN
0003-6951

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