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A silicon-on-insulator structure formed by implantation of megaelectronvolt oxygen

✍ Scribed by J.J. Grob; A. Grob; P. Thevenin; P. Siffert; A. Golanski; C. d'Anterroches


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
709 KB
Volume
2
Category
Article
ISSN
0921-5107

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