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Silicon-on-insulator by oxygen implantation: An advanced technology

✍ Scribed by M. Bruel; J. Margail; C. Jaussaud; A.J. Auberton-Hervé; J. Stoemenos


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
854 KB
Volume
8
Category
Article
ISSN
0167-9317

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