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Silicon-on-insulator by oxygen ion implantation

✍ Scribed by H.W. Lam; R.F. Pinizzotto

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 530 KB
Volume: 63
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(83)90167-7

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