✦ LIBER ✦

Study of silicon-on-insulator structures formed by low dose oxygen and nitrogen implantation

✍ Scribed by J.K.Y. Wong; J.A. Kilner

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 430 KB
Volume: 12
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(92)90261-7

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Microstructure of silicon-on-insulator s

Microstructure of silicon-on-insulator structures produced by high dose nitrogen implantation of silicon

✍ CD Meekison; GR Booker; KJ Reeson; PLF Hemment; RJ Chater; JA Kilner; JR Davis 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 559 KB

SIMS analysis of silicon on insulator st

SIMS analysis of silicon on insulator structures formed by high-dose O+ implantation into silicon

✍ J.A. Kilner; S.D. Littlewood; P.L.F. Hemment; E. Maydell-Ondrusz; K.G. Stephens 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 372 KB

A silicon-on-insulator structure formed

A silicon-on-insulator structure formed by implantation of megaelectronvolt oxygen

✍ J.J. Grob; A. Grob; P. Thevenin; P. Siffert; A. Golanski; C. d'Anterroches 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 709 KB

Properties of SOI structures formed by h

Properties of SOI structures formed by high dose oxygen implantation into silicon

✍ Lu Diantong; Lu Wuxing; Wang Zhonglie; Du Yongchang; Zheng Huaide; Mo Dang; Lian 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 264 KB

The anomalous depth distribution of low

The anomalous depth distribution of low dose oxygen and nitrogen ions implanted into silicon

✍ JKY Wong; JA Kilner; AB Danilin; IV Charniy; LA Charniy 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 298 KB

Non-destructive characterization of nitr

Non-destructive characterization of nitrogen-implanted silicon-on-insulator structures by spectroscopic ellipsometry

✍ M. Fried; T. Lohner; J.M.M. De Nijs; A. Van Silfhout; L.J. Hanekamp; N.Q. Khanh; 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 465 KB

## 1. Introduction Silicon-on-insulator (SO1) structures implanted with 200 or 400 keV N ÷ ions at a dose of 7.5×1017cm 2 were studied by spectroscopic ellipsometry (SE). The SE measurements were carried out in the 300-700 nm wavelength (4.13-1.78 eV photon energy) range. The SE data were analysed