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SIMS analysis of silicon on insulator structures formed by high-dose O+ implantation into silicon

✍ Scribed by J.A. Kilner; S.D. Littlewood; P.L.F. Hemment; E. Maydell-Ondrusz; K.G. Stephens


Publisher
Elsevier Science
Year
1983
Weight
372 KB
Volume
218
Category
Article
ISSN
0167-5087

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