✦ LIBER ✦
Electrical and optical characterisation of double SIMOX structures formed by sequential high energy oxygen implantation into silicon
✍ Scribed by N. Hatzopoulos; D. Panknin; W. Fukarek; W. Skorupa; D.I. Siapkas; P.L.F. Hemment
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 353 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0167-9317
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