✦ LIBER ✦

Microstructure of silicon-on-insulator structures produced by high dose nitrogen implantation of silicon

✍ Scribed by CD Meekison; GR Booker; KJ Reeson; PLF Hemment; RJ Chater; JA Kilner; JR Davis

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SIMS analysis of silicon on insulator st

✍ J.A. Kilner; S.D. Littlewood; P.L.F. Hemment; E. Maydell-Ondrusz; K.G. Stephens 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 372 KB

Properties of SOI structures formed by h

✍ Lu Diantong; Lu Wuxing; Wang Zhonglie; Du Yongchang; Zheng Huaide; Mo Dang; Lian 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 264 KB

Formation of buried insulating layers in

✍ P.L.F. Hemment; E. Maydell-Ondrusz; K.G. Stephens; J. Butcher; D. Ioannou; J. Al 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 534 KB

The formation of buried Si3N4 layers in

✍ U. Kreissig; W. Skorupa; E. Hensel 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 177 KB

Properties of epitaxial silicon layers o

✍ W Skorupa; U Kreissig; H Oertel; H Bartsch 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 530 KB

Rutherford backscattering and channellin

✍ RA Yankov; RV Gribkovskii; FF Komarov 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 376 KB