✦ LIBER ✦
Rutherford backscattering and channelling studies of buried nitride structures directly produced by high intensity ion implantation of nitrogen into silicon
✍ Scribed by RA Yankov; RV Gribkovskii; FF Komarov
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 376 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0042-207X
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