✦ LIBER ✦

Properties of epitaxial silicon layers on buried silicon nitride produced by ion implantation

✍ Scribed by W Skorupa; U Kreissig; H Oertel; H Bartsch

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Properties of epitaxial silicon layers o

📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 135 KB

Synthesis of buried silicon nitride laye

✍ C.M.S. Rauthan; Ami Chand; Sudhir Chandra; G. Bose 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 277 KB

Buried Si3N4 layers in silicon produced

✍ R.V. Gribkovskii; F.F. Komarov; A.P. Novikov 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 201 KB

The formation of buried Si3N4 layers in

✍ U. Kreissig; W. Skorupa; E. Hensel 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 177 KB

Rutherford backscattering and channellin

✍ RA Yankov; RV Gribkovskii; FF Komarov 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 376 KB

ESCA investigation of ion beam synthesiz

✍ A.D. Yadav; M.C. Joshi 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 214 KB