Properties of epitaxial silicon layers on buried silicon nitride produced by ion implantation : W. Skorupa, U. Kreissig, H. Oertel and H. Bartsch. Vacuum36(11/12), 933 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 135 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90164-8