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Properties of SOI structures formed by high dose oxygen implantation into silicon

✍ Scribed by Lu Diantong; Lu Wuxing; Wang Zhonglie; Du Yongchang; Zheng Huaide; Mo Dang; Liang Zhongning


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
264 KB
Volume
39
Category
Article
ISSN
0042-207X

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