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Laser annealing of Al implanted silicon carbide: Structural and optical characterization

✍ Scribed by C. Boutopoulos; P. Terzis; I. Zergioti; A.G. Kontos; K. Zekentes; K. Giannakopoulos; Y.S. Raptis

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 395 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.02.070

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