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Implantation and annealing of aluminum in 4H silicon carbide

✍ Scribed by M. Rambach; F. Schmid; M. Krieger; L. Frey; A.J. Bauer; G. Pensl; H. Ryssel

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 229 KB
Volume: 237
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.04.079

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