Infrared and Photoluminescence Studies on Silicon Oxide Formation in Oxygen-Implanted Silicon Annealed Under Enhanced Pressure

✍ Scribed by B. Surma; L. Bryja; A. Misiuk; G. Gawlik; J. Jun; I. V. Antonova; M. Prujszczyk

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 173 KB
• Volume: 36
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/1521-4079(200110)36:8/10<943::aid-crat943>3.0.co;2-f