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Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering

โœ Scribed by Tianlin Yang; Zhisheng Zhang; Yanhui Li; MaoShui Lv; Shumei Song; Zhongchen Wu; Jincheng Yan; Shenghao Han


Book ID
108063727
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
178 KB
Volume
255
Category
Article
ISSN
0169-4332

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Polycrystalline Zn 3 N 2 films are prepared on Si and quartz glass substrates by RF magnetron sputtering at room temperature. The structural and optical properties are studied by X-ray diffraction and double beam spectrophotometer, respectively. X-ray diffraction indicates that the Zn 3 N 2 films de