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Structural, optical and mechanical properties of aluminium nitride films prepared by reactive DC magnetron sputtering

✍ Scribed by S. Venkataraj; D. Severin; R. Drese; F. Koerfer; M. Wuttig

Book ID: 108288993
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 574 KB
Volume: 502
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.07.281

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